Oscillator based surface acoustic wave gyroscopes

Yusuke Musha, Motoaki Hara, Hiroki Asano, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, angular rate sensing based on surface acoustic wave (SAW) resonance was newly reported. Our sensor uses an oscillator consisted of a single SAW resonator and an amplifier. The angular rate was obtained from the change of oscillation frequency. The SAW resonator was a one-port resonator, and simply constructed by an interdigital transducer (IDT) and a pair of grating reflector. Any nanoscale scattering patterns or any complicate unidirectional IDTs (UDTs) were not included. In the demonstration, the sensitivity of 7.×-3 Hz /deg·s-1 was achieved when using the SAW resonator with the resonant frequency of 9.7 MHz. The SAW gyroscopes can detect the angular rate as the rotation axis was parallel to the SAW propagation direction. But, it did not reply when the rotation axis was orthogonal. These results agreed with theoretical predictions well.

Original languageEnglish
Title of host publication2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages557-560
Number of pages4
ISBN (Electronic)9781509019472
DOIs
Publication statusPublished - 2016 Nov 28
Event11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Sendai, Japan
Duration: 2016 Apr 172016 Apr 20

Publication series

Name2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Other

Other11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
CountryJapan
CitySendai
Period16/4/1716/4/20

Keywords

  • Sensor module
  • Surface acoustic wave (SAW)
  • gyroscope
  • oscillator

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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