TY - GEN
T1 - Origin and dynamic properties of major intrinsic nonradiative recombination centers in wide bandgap nitride semiconductors
AU - Chichibu, Shigefusa F.
AU - Shima, Kohei
AU - Kojima, Kazunobu
AU - Ishibashi, Shoji
AU - Uedono, Akira
PY - 2020
Y1 - 2020
N2 - With respect to (Al,In,Ga)N epilayers and quantum wells, threading dislocations (TDs) have long been believed to as the principal limiting factor for the internal quantum efficiency of the near-band-edge emission. However, the realization of low TD density GaN and AlN substrates and (Al,In,Ga)N layers enabled investigating the roles of point defects and impurities without interferences by TDs, and vacancy-complexes have been revealed to act as origins of major Shockley- Read-Hall (SRH)-type nonradiative recombination centers (NRCs) in GaN. Accordingly, the concentration of NRCs (NNRC) must be decreased in both optical devices and power-switching electronic devices. Here we show the results of positron annihilation and time-resolved luminescence measurements on n- and p-type GaN, AlN, and Al0.6Ga0.4N alloys to reveal the origins of major intrinsic SRH-NRCs and to obtain their capture coefficients for minority carriers. For unintentionally doped and doped n-type GaN, divacancies comprising of a Ga-vacancy (VGa) and a N-vacancy (VN), namely VGaVN, are assigned as major SRH-NRCs with a hole capture-coefficient (Cp) of 6×10-7 cm3s-1. For Mg-doped ptype GaN epilayers grown by metalorganic vapor phase epitaxy (MOVPE), VGa(VN)2 are assigned as major NRCs with electron capture-coefficient (Cn) of 8×10-6 cm3s-1. For Mg-implanted GaN, VGaVN are the dominant NRCs right after implantation, and they agglomerate into (VGaVN)3 clusters with Cn of 5×10-6 cm3s-1 after high-temperature annealing. Since AlN films grown by MOVPE usually contain vacancy-clusters comprising of an Al-vacancy (VAl) such as VAl(VN)2-3, complexes of a cation-vacancy and a few VNs may be the major NRCs in AlN and Al0.6Ga0.4N alloys.
AB - With respect to (Al,In,Ga)N epilayers and quantum wells, threading dislocations (TDs) have long been believed to as the principal limiting factor for the internal quantum efficiency of the near-band-edge emission. However, the realization of low TD density GaN and AlN substrates and (Al,In,Ga)N layers enabled investigating the roles of point defects and impurities without interferences by TDs, and vacancy-complexes have been revealed to act as origins of major Shockley- Read-Hall (SRH)-type nonradiative recombination centers (NRCs) in GaN. Accordingly, the concentration of NRCs (NNRC) must be decreased in both optical devices and power-switching electronic devices. Here we show the results of positron annihilation and time-resolved luminescence measurements on n- and p-type GaN, AlN, and Al0.6Ga0.4N alloys to reveal the origins of major intrinsic SRH-NRCs and to obtain their capture coefficients for minority carriers. For unintentionally doped and doped n-type GaN, divacancies comprising of a Ga-vacancy (VGa) and a N-vacancy (VN), namely VGaVN, are assigned as major SRH-NRCs with a hole capture-coefficient (Cp) of 6×10-7 cm3s-1. For Mg-doped ptype GaN epilayers grown by metalorganic vapor phase epitaxy (MOVPE), VGa(VN)2 are assigned as major NRCs with electron capture-coefficient (Cn) of 8×10-6 cm3s-1. For Mg-implanted GaN, VGaVN are the dominant NRCs right after implantation, and they agglomerate into (VGaVN)3 clusters with Cn of 5×10-6 cm3s-1 after high-temperature annealing. Since AlN films grown by MOVPE usually contain vacancy-clusters comprising of an Al-vacancy (VAl) such as VAl(VN)2-3, complexes of a cation-vacancy and a few VNs may be the major NRCs in AlN and Al0.6Ga0.4N alloys.
KW - AlGaN
KW - Complex
KW - Defect
KW - GaN
KW - Luminescence dynamics
KW - Nonradiative recombination center
KW - Vacancy
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U2 - 10.1117/12.2545409
DO - 10.1117/12.2545409
M3 - Conference contribution
AN - SCOPUS:85082649180
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Gallium Nitride Materials and Devices XV
A2 - Fujioka, Hiroshi
A2 - Morkoc, Hadis
A2 - Schwarz, Ulrich T.
PB - SPIE
T2 - Gallium Nitride Materials and Devices XV 2020
Y2 - 4 February 2020 through 6 February 2020
ER -