Abstract
(006)-, (104)- and (012)-oriented α-Al2O3 films in a single phase were prepared by laser chemical vapor deposition (LCVD) using a diode laser. The effects of laser power (PL), deposition temperature (Tdep) and total pressure (Ptot) on the crystal phase, orientation, microstructure and deposition rate (Rdep) were investigated. The orientation of α-Al2O3 films changed from (006) to (104) to (012) with increasing PL. Higher oriented films were deposited at a lower Ptot. The microstructure of α-Al2O3 films changed from a cauliflower-like structure to a hexagonal faceted structure to a pyramid-like structure with increasing PL. The Rdep of oriented α-Al 2O3 films slightly increased from 30 to 40μm·h-1 with decreasing PL, which was about 50 times greater than that of conventional thermal CVD.
Original language | English |
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Pages (from-to) | 366-369 |
Number of pages | 4 |
Journal | Journal of the Ceramic Society of Japan |
Volume | 118 |
Issue number | 1377 |
DOIs | |
Publication status | Published - 2010 May |
Keywords
- Laser CVD
- Orientation
- α-AlO
ASJC Scopus subject areas
- Ceramics and Composites
- Chemistry(all)
- Condensed Matter Physics
- Materials Chemistry