Orientation and dielectric properties of sol-gel derived PbTiO 3 thin film

T. Hirano, Y. Kondo, H. Suzuki, So Ito, S. Kaneko, T. Wada

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

Single phase perovskite lead titanate thin films were successfully deposited on Si wafer with platinum electrode at 450 °C through sol-gel method from precursor solution with 20 mol% excess lead precursor. The degree of c-axis orientation of the resultant film increased with increase of lead content. The ferroelectricities of resultant films annealed at 450 °C were significantly affected by pre-annealing temperature.

Original languageEnglish
Pages (from-to)127-130
Number of pages4
JournalKey Engineering Materials
Volume169
Publication statusPublished - 1999 Jan 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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