Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications

M. A. Gosálvez, B. Tang, P. Pal, K. Sato, Y. Kimura, K. Ishibashi

Research output: Contribution to journalArticlepeer-review

61 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications'. Together they form a unique fingerprint.

Chemistry

Biochemistry, Genetics and Molecular Biology

Material Science

Pharmacology, Toxicology and Pharmaceutical Science