Ordered array of polymer microspheres on patterned silicon substrate fabricated using step-by-step deposition method

Tsunenobu Onodera, Yosuke Takaya, Tadashi Mitsui, Yutaka Wakayama, Hidetoshi Oikawa

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Two-dimensional ordered arrays of polystyrene microspheres (PSMSs) with a large-scale area were successfully fabricated on a lithographically patterned substrate using a so-called tapered cell. The repetition of the deposition procedure provided the subsequent second array on the first array as a template. Consequently, we succeeded in the fabrication of a Kagome structure on the hexagonally patterned substrate, and evidently observed through the corresponding fluorescence microscopy images that two types of fluorescent PSMSs were, respectively, separately arranged in the dimple and on the terrace. Namely, a potential application of the present method using a patterned substrate would be the step-by-step deposition of microspheres with different refractive indexes, and optoelectronic and magnetic properties.

Original languageEnglish
Pages (from-to)1404-1407
Number of pages4
JournalJapanese journal of applied physics
Volume47
Issue number2 PART 2
DOIs
Publication statusPublished - 2008 Feb 15

Keywords

  • Kagome structure
  • Patterned substrate
  • Polystyrene microsphere
  • Step-by-step deposition
  • Tapered cell

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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