Ordered array of polymer microspheres on patterned silicon substrate fabricated using step-by-step deposition method

Tsunenobu Onodera, Yosuke Takaya, Tadashi Mitsui, Yutaka Wakayama, Hidetoshi Oikawa

    Research output: Contribution to journalArticlepeer-review

    12 Citations (Scopus)

    Abstract

    Two-dimensional ordered arrays of polystyrene microspheres (PSMSs) with a large-scale area were successfully fabricated on a lithographically patterned substrate using a so-called tapered cell. The repetition of the deposition procedure provided the subsequent second array on the first array as a template. Consequently, we succeeded in the fabrication of a Kagome structure on the hexagonally patterned substrate, and evidently observed through the corresponding fluorescence microscopy images that two types of fluorescent PSMSs were, respectively, separately arranged in the dimple and on the terrace. Namely, a potential application of the present method using a patterned substrate would be the step-by-step deposition of microspheres with different refractive indexes, and optoelectronic and magnetic properties.

    Original languageEnglish
    Pages (from-to)1404-1407
    Number of pages4
    JournalJapanese journal of applied physics
    Volume47
    Issue number2 PART 2
    DOIs
    Publication statusPublished - 2008 Feb 15

    Keywords

    • Kagome structure
    • Patterned substrate
    • Polystyrene microsphere
    • Step-by-step deposition
    • Tapered cell

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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