Optimizing the fabrication process of a high-efficiency blazed grating through diamond scribing and molding

Chabum Lee, Tsunemoto Kuriyagawa, Do Kyun Woo, Sun Kyu Lee

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

This paper presents the experimental investigation of an optimal hot embossing process to prevent the nanoscale thermal deformation of microstructures replicated from the electroless Ni mold fabricated by the diamond tool-interfered scribing method. A polymer-based PMMA was replicated from the mold with the blazed profile: period 2.0 μm and depth 0.2 μm. The molding conditions, the applying pressure (Pm), molding temperature (Tm) and demolding temperature (Td) were chosen as experiment parameters. In terms of the quality of surface smoothness, profile, sharp edge, surface roughness and optical performance of the replica, the conditions, Pm = 0.9 MPa, Tm = 150 °C and T d = 20 °C, showed a best results. From optical testing, diffraction efficiency of the replica was measured, 87.6%, and the replica molded in other conditions showed a noticeable efficiency drop due to the molding error.

Original languageEnglish
Article number055028
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number5
DOIs
Publication statusPublished - 2010

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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