Optimization of Pb content in a precursor solution for the fabrication of (Pb,La)(Zr,Ti)O3 films for optical applications by chemical solution deposition

Hiromi Shima, Hiroshi Naganuma, Yukihiro Ishii, Akira Takashima, Soichiro Okamura

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

400-nm-thick (Pb,La)(Zr,Ti)O3 (PLZT) films with a composition of Pb:La:Zr:Ti = X:3:65:35 were fabricated on (111)Pt/Ti/SiO2/(100)Si substrates at 700°C by chemical solution deposition using precursor solutions with Pb contents of X = 107, 112, 116, 121 and 126. The PLZT films fabricated from the solutions of X = 107 and 112 had bimodal structure and included pyrochlore phase. The pyrochlore region decreased with increasing the Pb content, and single perovskite phase PLZT films with well-filled structure were obtained at the Pb contents of 121 and 126. From these results, we concluded that the Pb-content of X = 121 (125 mol% relative to a stoichiometric value) was optimum for the fabrication of PLZT films for optical applications. This optimization slightly improved electrical and electrooptic properties of the PLZT films, and finally the PLZT(121/3/65/35) film showed the Pockels coefficient of 84 pm/V.

Original languageEnglish
Pages (from-to)223-227
Number of pages5
JournalFerroelectrics
Volume357
Issue number1 PART 3
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event5th Asian Meeting on Ferroelectricity, AMF-5 - Noda, Japan
Duration: 2006 Sep 32006 Sep 7

Keywords

  • (Pb,La)(Zr,Ti)O
  • CSD
  • Electrooptic effect
  • Film
  • Pb content

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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