TY - GEN
T1 - Optimization of nano-topography distribution by compensation of grinding conditions
AU - Yoshihara, N.
AU - Nishikawa, N.
AU - Mizuno, M.
AU - Iyama, T.
AU - Kuriyagawa, Tsunemoto
PY - 2011/1/1
Y1 - 2011/1/1
N2 - Precision optical parts have become increasingly important in various fields, including semiconductors and imaging technologies. Currently, the form accuracy of an aspherical lens is less than 50 nm, and the maximum height roughness is less than 20 nm. However, nano-topography, which is periodic waviness of small amplitude, remains on the ground surface, resulting in grinding marks[1]. The presence of grinding marks on the ground surface disturbs the uniformity and deteriorates the accuracy of optical components. Therefore, we propose "Uniformity" as an additional criterion of quality for a ground surface. As grinding marks deteriorate the accuracy of optical instruments, the nano-topography needs to be controlled and uniformity needs to be improved. In this study, the distribution of the nano-topography on a ground surface is calculated theoretically. Using the calculated results, the actual grinding conditions can be estimated. The grinding conditions can then be compensated to optimize the distribution of the nano-topography.
AB - Precision optical parts have become increasingly important in various fields, including semiconductors and imaging technologies. Currently, the form accuracy of an aspherical lens is less than 50 nm, and the maximum height roughness is less than 20 nm. However, nano-topography, which is periodic waviness of small amplitude, remains on the ground surface, resulting in grinding marks[1]. The presence of grinding marks on the ground surface disturbs the uniformity and deteriorates the accuracy of optical components. Therefore, we propose "Uniformity" as an additional criterion of quality for a ground surface. As grinding marks deteriorate the accuracy of optical instruments, the nano-topography needs to be controlled and uniformity needs to be improved. In this study, the distribution of the nano-topography on a ground surface is calculated theoretically. Using the calculated results, the actual grinding conditions can be estimated. The grinding conditions can then be compensated to optimize the distribution of the nano-topography.
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M3 - Conference contribution
AN - SCOPUS:84908243604
T3 - Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
SP - 208
EP - 211
BT - Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
A2 - Shore, P.
A2 - Spaan, Henny
A2 - Van Brussel, H.
A2 - Burke, Theresa
PB - euspen
T2 - 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Y2 - 23 May 2011 through 26 May 2011
ER -