Optimization of grinding conditions utilizing nano-topography distribution analysis

Nobuhito Yoshihara, Jiwang Yan, Tsunemoto Kuriyagawa

Research output: Contribution to conferencePaper

Abstract

Recently, optical parts are required to be high precision. And the form accuracy becomes under 50nm. The form error, which distributes periodically on ground surface, is named nano-topography. Because the distribution of the nano-topography changes in a poorly-repeatable manner, it is quite difficult to compensate. From previous study, relationship between spatial frequency of the nano-topography and grinding conditions is investigated. And it is found that the spatial frequency of the nano-topography can be controlled by the grinding conditions. In this paper, actual grinding condition is estimated by the distribution of nano-topography. And the grinding condition is compensated so that to optimize the distribution of nano-topography.

Original languageEnglish
Publication statusPublished - 2009 Dec 1
Event5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan
Duration: 2009 Dec 22009 Dec 4

Other

Other5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
CountryJapan
CityOsaka
Period09/12/209/12/4

Keywords

  • Compensation grinding
  • Nano-topography
  • Ultra-precision grinding
  • Vibration

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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    Yoshihara, N., Yan, J., & Kuriyagawa, T. (2009). Optimization of grinding conditions utilizing nano-topography distribution analysis. Paper presented at 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009, Osaka, Japan.