Optimal design of induction heating equipment for high-speed processing of a semiconductor

Yoshifumi Okamoto, Toshio Imai, Daisuke Miyagi, Norio Takahashi, Kazuhiro Ozaki, Hiroshi Ono, Naoki Uchida

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high quality, uniform healing is necessary, but it is not easy to heat uniformly by using the conventional induction heating equipment. For this purpose, the zone control induction heating equipment is jointly developed with Mitsui Engineering Shipbuilding Co., Ltd. In this paper, the optimization of current in each coil is carried out using the finite element method and the optimization method in order to obtain a uniform eddy current loss distribution an graphite.

Original languageEnglish
Pages (from-to)1045-1052
Number of pages8
JournalCOMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering
Volume23
Issue number4
DOIs
Publication statusPublished - 2004 Dec 3
Externally publishedYes

Keywords

  • Finite element analysis
  • Heating
  • Optimization techniques

ASJC Scopus subject areas

  • Computer Science Applications
  • Computational Theory and Mathematics
  • Electrical and Electronic Engineering
  • Applied Mathematics

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