Optimal design of induction heating equipment for high-speed processing of a semiconductor

Yoshifumi Okamoto; Toshio Imai; Daisuke Miyagi; Norio Takahashi; Kazuhiro Ozaki; Hiroshi Ono; Naoki Uchida

doi:10.1108/03321640410553472

Optimal design of induction heating equipment for high-speed processing of a semiconductor

Yoshifumi Okamoto, Toshio Imai, Daisuke Miyagi, Norio Takahashi, Kazuhiro Ozaki, Hiroshi Ono, Naoki Uchida

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high quality, uniform healing is necessary, but it is not easy to heat uniformly by using the conventional induction heating equipment. For this purpose, the zone control induction heating equipment is jointly developed with Mitsui Engineering Shipbuilding Co., Ltd. In this paper, the optimization of current in each coil is carried out using the finite element method and the optimization method in order to obtain a uniform eddy current loss distribution an graphite.

Original language	English
Pages (from-to)	1045-1052
Number of pages	8
Journal	COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering
Volume	23
Issue number	4
DOIs	https://doi.org/10.1108/03321640410553472
Publication status	Published - 2004 Dec 3
Externally published	Yes

Keywords

Finite element analysis
Heating
Optimization techniques

ASJC Scopus subject areas

Computer Science Applications
Computational Theory and Mathematics
Electrical and Electronic Engineering
Applied Mathematics

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10.1108/03321640410553472

Cite this

Optimal design of induction heating equipment for high-speed processing of a semiconductor. / Okamoto, Yoshifumi; Imai, Toshio; Miyagi, Daisuke; Takahashi, Norio; Ozaki, Kazuhiro; Ono, Hiroshi; Uchida, Naoki.

In: COMPEL - The International Journal for Computation and Mathematics in Electrical and Electronic Engineering, Vol. 23, No. 4, 03.12.2004, p. 1045-1052.

Research output: Contribution to journal › Article › peer-review

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AU - Okamoto, Yoshifumi

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AU - Ozaki, Kazuhiro

AU - Ono, Hiroshi

AU - Uchida, Naoki

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N2 - Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high quality, uniform healing is necessary, but it is not easy to heat uniformly by using the conventional induction heating equipment. For this purpose, the zone control induction heating equipment is jointly developed with Mitsui Engineering Shipbuilding Co., Ltd. In this paper, the optimization of current in each coil is carried out using the finite element method and the optimization method in order to obtain a uniform eddy current loss distribution an graphite.

AB - Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high quality, uniform healing is necessary, but it is not easy to heat uniformly by using the conventional induction heating equipment. For this purpose, the zone control induction heating equipment is jointly developed with Mitsui Engineering Shipbuilding Co., Ltd. In this paper, the optimization of current in each coil is carried out using the finite element method and the optimization method in order to obtain a uniform eddy current loss distribution an graphite.

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Optimal design of induction heating equipment for high-speed processing of a semiconductor

Abstract

Keywords

ASJC Scopus subject areas

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