Optically flat micromirror using stretched membrane with crystallization-induced stress

Minoru Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The flat and light-weighted micromirror is realized using the tense poly-Si film across a rigid c-Si drum. The tensile stress of ∼600 MPa is obtained using the crystallization of a-Si film. Compared to the research carried out by Nee et al., the initial film has the purer amorphous phase and generates larger stress. The mirror satisfies the better optical flatness <λ/10 for the visible light. The peak-to-valley distance of the micromirror is ∼20 nm. The membrane profile is found to depend on the process sequence relating to the timing of the annealing. The mirror shape is stable against the high temperature.

Original languageEnglish
Title of host publication2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages27-28
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China
Duration: 2007 Aug 122007 Aug 16

Publication series

Name2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Country/TerritoryTaiwan, Province of China
CityHualien
Period07/8/1207/8/16

Keywords

  • Amorphous
  • Crystallization
  • Micromirror
  • Optical flatness
  • Tensile stress

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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