Optically flat micromirror designs using stretched membrane with crystallization-induced stress

Minora Sasaki, Takashi Sasaki, Kazuhiro Hane, Hideo Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The flat and light-weighted micromirror is realized using the tense poly-Si membrane across a rigid c-Si drum. The tensile stress of ∼600 MPa is obtained using the crystallization of a-Si. The yield ratio depends on the design. The membrane profile is found to depend on the process sequence relating to the timing of the crystalization. The mirror satisfies the optical flatness <λ/10 for the visible light. The peak-to-valley distance of ∼20 nm is realized in the best design. The mirror flatness is stable against the temperature even though the mirror is metalized.

Original languageEnglish
Title of host publicationLEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings
Pages709-710
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Event20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS - Lake Buena Vista, FL, United States
Duration: 2007 Oct 212007 Oct 25

Publication series

NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
ISSN (Print)1092-8081

Other

Other20th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS
Country/TerritoryUnited States
CityLake Buena Vista, FL
Period07/10/2107/10/25

Keywords

  • Amorphous
  • Crystallization
  • Micromirror
  • Optical flatness
  • Tensile stress

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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