Optically controllable emitter array with pn-junction integrated Si tip

Yujiro Tanaka, Hidetoshi Miyashita, Eiichi Tomono, Masayoshi Esashi, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a Si field emitter array with an ability of the optical switching of electron emission has been developed. Each emitter has pn junction at the apex to control emission current optically. Experiments of optical switching of electron emission have been demonstrated successfully. This concept of the optical control of emission can reduce the number of metal wires on the emission device; therefore, a high density emitter array can be achieved.

Original languageEnglish
Title of host publicationProceedings - IVNC 2011
Subtitle of host publication2011 24th International Vacuum Nanoelectronics Conference
Pages57-58
Number of pages2
Publication statusPublished - 2011
Event2011 24th International Vacuum Nanoelectronics Conference, IVNC 2011 - Wuppertal, Germany
Duration: 2011 Jul 182011 Jul 22

Publication series

NameProceedings - IVNC 2011: 2011 24th International Vacuum Nanoelectronics Conference

Other

Other2011 24th International Vacuum Nanoelectronics Conference, IVNC 2011
Country/TerritoryGermany
CityWuppertal
Period11/7/1811/7/22

Keywords

  • Electron emission
  • Emitter array
  • Microfabrication
  • Multi electron beam lithography
  • Optical control

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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