Abstract
In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.
Original language | English |
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Article number | 5289 |
Journal | Sensors (Switzerland) |
Volume | 19 |
Issue number | 23 |
DOIs | |
Publication status | Published - 2019 Dec 1 |
Keywords
- Dimensional metrology
- Interference lithography
- Multi-axis angle and displacement measurement
- Optical sensor
- Planar encoder
- Planar scale grating
ASJC Scopus subject areas
- Analytical Chemistry
- Biochemistry
- Atomic and Molecular Physics, and Optics
- Instrumentation
- Electrical and Electronic Engineering