Optical sensors for multi-axis angle and displacement measurement using grating reflectors

Research output: Contribution to journalReview articlepeer-review

10 Citations (Scopus)

Abstract

In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.

Original languageEnglish
Article number5289
JournalSensors (Switzerland)
Volume19
Issue number23
DOIs
Publication statusPublished - 2019 Dec 1

Keywords

  • Dimensional metrology
  • Interference lithography
  • Multi-axis angle and displacement measurement
  • Optical sensor
  • Planar encoder
  • Planar scale grating

ASJC Scopus subject areas

  • Analytical Chemistry
  • Biochemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electrical and Electronic Engineering

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