Optical scanner with deformable mirror fabricated from SOI wafer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An optical scanner with a deformable mirror is fabricated using SOI wafer. A lμm thick top silicon layer of SOI wafer is used to fabricate a deformable mirror. Movable comb and fixed comb are fabricated from the silicon substrate. The mirror is rotated by the comb actuator and it is also deformed by an electrostatic force independently. The rotation angle of the mirror is 12 degrees at 80V. The deformation at the mirror center is 3nm at 100V.

Original languageEnglish
Title of host publication2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
Pages96-97
Number of pages2
DOIs
Publication statusPublished - 2008 Oct 23
Event2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany
Duration: 2008 Aug 112008 Aug 14

Publication series

Name2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Other

Other2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
CountryGermany
CityFreiburg
Period08/8/1108/8/14

Keywords

  • SOI wafer
  • Scanner
  • Wave front control

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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