Optical scanner prepared by wafer bending technique

M. Ishimori, Jong Hyeong Song, M. Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, an optical scanner driven by the vertical comb drive actuator is prepared using the wafer bending technique. The device structure is presented, as well as the results of the measured mirror rotation angle, frequency characteristics and transient response.

Original languageEnglish
Title of host publication2003 IEEE/LEOS International Conference on Optical MEMS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages159-160
Number of pages2
ISBN (Electronic)078037830X, 9780780378308
DOIs
Publication statusPublished - 2003 Jan 1
Event2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States
Duration: 2003 Aug 182003 Aug 21

Publication series

Name2003 IEEE/LEOS International Conference on Optical MEMS

Other

Other2003 IEEE/LEOS International Conference on Optical MEMS
CountryUnited States
CityWaikoloa
Period03/8/1803/8/21

Keywords

  • Actuators
  • Machine intelligence
  • Microactuators
  • Micromechanical devices
  • Microstructure
  • Mirrors
  • Optical propagation
  • Resists
  • Systems engineering and theory
  • Voltage

ASJC Scopus subject areas

  • Engineering(all)

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