Optical scanner based on a NiMnGa thin film microactuator

M. Kohl; S. Hoffmann; Y. Liu; M. Ohtsuka; T. Takagi

doi:10.1051/jp4:20031094

Optical scanner based on a NiMnGa thin film microactuator

M. Kohl, S. Hoffmann, Y. Liu, M. Ohtsuka, T. Takagi

Research output: Contribution to journal › Conference article › peer-review

31 Citations (Scopus)

Abstract

An optical scanner of 9 × 3 × 5 mm³ size is presented, which is driven by a microactuator of Ni₂MnGa. The microactuator is fabricated by magnetron sputtering of a Ni₂MnGa thin film and subsequent photochemical micromachining. For operation of the scanner, a novel mechanism is proposed, which is based on the antagonism of magnetic and shape recovery forces. Thus, large bending forces in both actuation directions and low biasing forces can be generated simultaneously in a single microdevice. This mechanism is used to realize a large scanning angle of 50 deg. The dynamics of motion is characterized by heat-transfer times. Typical heating and cooling time constants are 2 and 16 ms, respectively. Below a critical frequency of about 55 Hz, the scanning angle is independent of the actuation frequency.

Original language	English
Pages (from-to)	1185-1188
Number of pages	4
Journal	Journal De Physique. IV : JP
Volume	112 II
DOIs	https://doi.org/10.1051/jp4:20031094
Publication status	Published - 2003 Oct
Event	International Conference on Martensitic Transformations - Espoo, Finland Duration: 2002 Jun 10 → 2002 Jun 14

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1051/jp4:20031094

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title = "Optical scanner based on a NiMnGa thin film microactuator",

abstract = "An optical scanner of 9 × 3 × 5 mm3 size is presented, which is driven by a microactuator of Ni2MnGa. The microactuator is fabricated by magnetron sputtering of a Ni2MnGa thin film and subsequent photochemical micromachining. For operation of the scanner, a novel mechanism is proposed, which is based on the antagonism of magnetic and shape recovery forces. Thus, large bending forces in both actuation directions and low biasing forces can be generated simultaneously in a single microdevice. This mechanism is used to realize a large scanning angle of 50 deg. The dynamics of motion is characterized by heat-transfer times. Typical heating and cooling time constants are 2 and 16 ms, respectively. Below a critical frequency of about 55 Hz, the scanning angle is independent of the actuation frequency.",

author = "M. Kohl and S. Hoffmann and Y. Liu and M. Ohtsuka and T. Takagi",

year = "2003",

month = oct,

doi = "10.1051/jp4:20031094",

language = "English",

volume = "112 II",

pages = "1185--1188",

journal = "European Physical Journal: Special Topics",

issn = "1951-6355",

publisher = "Springer Verlag",

note = "International Conference on Martensitic Transformations ; Conference date: 10-06-2002 Through 14-06-2002",

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TY - JOUR

T1 - Optical scanner based on a NiMnGa thin film microactuator

AU - Kohl, M.

AU - Hoffmann, S.

AU - Liu, Y.

AU - Ohtsuka, M.

AU - Takagi, T.

PY - 2003/10

Y1 - 2003/10

N2 - An optical scanner of 9 × 3 × 5 mm3 size is presented, which is driven by a microactuator of Ni2MnGa. The microactuator is fabricated by magnetron sputtering of a Ni2MnGa thin film and subsequent photochemical micromachining. For operation of the scanner, a novel mechanism is proposed, which is based on the antagonism of magnetic and shape recovery forces. Thus, large bending forces in both actuation directions and low biasing forces can be generated simultaneously in a single microdevice. This mechanism is used to realize a large scanning angle of 50 deg. The dynamics of motion is characterized by heat-transfer times. Typical heating and cooling time constants are 2 and 16 ms, respectively. Below a critical frequency of about 55 Hz, the scanning angle is independent of the actuation frequency.

AB - An optical scanner of 9 × 3 × 5 mm3 size is presented, which is driven by a microactuator of Ni2MnGa. The microactuator is fabricated by magnetron sputtering of a Ni2MnGa thin film and subsequent photochemical micromachining. For operation of the scanner, a novel mechanism is proposed, which is based on the antagonism of magnetic and shape recovery forces. Thus, large bending forces in both actuation directions and low biasing forces can be generated simultaneously in a single microdevice. This mechanism is used to realize a large scanning angle of 50 deg. The dynamics of motion is characterized by heat-transfer times. Typical heating and cooling time constants are 2 and 16 ms, respectively. Below a critical frequency of about 55 Hz, the scanning angle is independent of the actuation frequency.

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DO - 10.1051/jp4:20031094

M3 - Conference article

AN - SCOPUS:0242456331

VL - 112 II

SP - 1185

EP - 1188

JO - European Physical Journal: Special Topics

JF - European Physical Journal: Special Topics

SN - 1951-6355

T2 - International Conference on Martensitic Transformations

Y2 - 10 June 2002 through 14 June 2002

ER -

Optical scanner based on a NiMnGa thin film microactuator

Abstract

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