Optical properties of MoSi2/Si multilayer laue lens as nanometer X-ray focusing device

Takahisa Koyama, Satoshi Ichimaru, Takuya Tsuji, Hidekazu Takano, Yasushi Kagoshima, Tadayuki Ohchi, Hisataka Takenaka

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


In this study, we designed and fabricated a multilayer Laue lens (MLL) as a hard X-ray focusing device. MoSi2 and Si were chosen to form the layers by DC magnetron sputtering owing to their superior properties. The optical properties of the MLL were measured at BL24XU of SPring-8 for 20-keV X-rays. In order to confirm the effect of dynamical diffraction, far-field diffraction ¡mages were captured at various incidence angles and depths. The resultant intensity distributions showed a similar structure to those derived through calculations. An almost diffraction-limited size of 28.2 nm was obtained. The maximum local diffraction efficiency was 64.7%.

Original languageEnglish
Pages (from-to)1170031-1170033
Number of pages3
JournalApplied Physics Express
Issue number11
Publication statusPublished - 2008 Nov 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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