Abstract
We have investigated optical properties and electrical properties of electrically degraded ZnSe layers by heavy Al doping, where their electron concentrations lie in the range of 7× 1017 -6× 1018 cm-3. Low-temperature photoluminescence exhibits two dominant radiative trap centers of 1.97 eV (RD1) and 2.25 eV (RD2), which are ascribed to VZn -related complex defects. Deep-level-transient spectroscopy shows two electron-trap centers at 0.16 eV (ND1) and 0.80 eV (ND2) below the conduction-band minimum. On the other hand, it is found that RD2 is dominant in relatively lightly doped ZnSe:Al layers below 7× 1018 cm-3 and RD1 is dominant in more heavily doped layers near 1× 1019 cm-3, while ND1 and ND2 are independent of Al doping concentration and their trap densities are estimated be below 3× 1016 cm-3. This indicates that RD1 and RD2 cause the carrier compensation in heavily doped ZnSe:Al layers. Their electron transport mechanism can be explained by ionized-impurity scattering mechanism.
Original language | English |
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Pages (from-to) | 259-264 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 26 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2008 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films