Optical probe detection of high-frequency surface acoustic waves generated by phase velocity scanning of laser interference fringes

Hideo Nishino; Yusuke Tsukahara; Yoshihiko Nagata; Toshio Koda; Kazushi Yamanaka

doi:10.1143/JJAP.33.3260

Optical probe detection of high-frequency surface acoustic waves generated by phase velocity scanning of laser interference fringes

Hideo Nishino, Yusuke Tsukahara, Yoshihiko Nagata, Toshio Koda, Kazushi Yamanaka

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm²power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.

Original language	English
Pages (from-to)	3260-3264
Number of pages	5
Journal	Japanese journal of applied physics
Volume	33
Issue number	5S
DOIs	https://doi.org/10.1143/JJAP.33.3260
Publication status	Published - 1994 May
Externally published	Yes

Keywords

Elastic anisotropy
Fringe
Laser-generated ultrasounds
Nondestructive evaluation
Optical knife edge method
Phase velocity scanning method
Scanning interference
Surface acoustic waves
Thermoelastic effect

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.33.3260

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Optical probe detection of high-frequency surface acoustic waves generated by phase velocity scanning of laser interference fringes. / Nishino, Hideo; Tsukahara, Yusuke; Nagata, Yoshihiko; Koda, Toshio; Yamanaka, Kazushi.

In: Japanese journal of applied physics, Vol. 33, No. 5S, 05.1994, p. 3260-3264.

Research output: Contribution to journal › Article › peer-review

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title = "Optical probe detection of high-frequency surface acoustic waves generated by phase velocity scanning of laser interference fringes",

abstract = "Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm2power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.",

keywords = "Elastic anisotropy, Fringe, Laser-generated ultrasounds, Nondestructive evaluation, Optical knife edge method, Phase velocity scanning method, Scanning interference, Surface acoustic waves, Thermoelastic effect",

author = "Hideo Nishino and Yusuke Tsukahara and Yoshihiko Nagata and Toshio Koda and Kazushi Yamanaka",

year = "1994",

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doi = "10.1143/JJAP.33.3260",

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AU - Nishino, Hideo

AU - Tsukahara, Yusuke

AU - Nagata, Yoshihiko

AU - Koda, Toshio

AU - Yamanaka, Kazushi

PY - 1994/5

Y1 - 1994/5

N2 - Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm2power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.

AB - Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm2power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.

KW - Elastic anisotropy

KW - Fringe

KW - Laser-generated ultrasounds

KW - Nondestructive evaluation

KW - Optical knife edge method

KW - Phase velocity scanning method

KW - Scanning interference

KW - Surface acoustic waves

KW - Thermoelastic effect

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Optical probe detection of high-frequency surface acoustic waves generated by phase velocity scanning of laser interference fringes

Abstract

Keywords

ASJC Scopus subject areas

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