TY - JOUR
T1 - Optical probe detection of high-frequency surface acoustic waves generated by phase velocity scanning of laser interference fringes
AU - Nishino, Hideo
AU - Tsukahara, Yusuke
AU - Nagata, Yoshihiko
AU - Koda, Toshio
AU - Yamanaka, Kazushi
PY - 1994/5
Y1 - 1994/5
N2 - Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm2power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.
AB - Laser-generated high-frequency surface acoustic waves (SAWs) and their optical detection for noncontact and nondestructive materials evaluation were presented. Scanning interference fringes (SIF) produced by intersecting two coherent pulsed laser beams on a tested object with different frequencies were used as a thermoelastic source to generate a 110 MHz SAW. The SAW was detected by the optical knife edge method using another continuous wave (CW) laser as a probe beam. Estimation of the SAW amplitude was carried out and the amplitude enhancement effect of the phase velocity scanning (PVS) method was verified. As a result, the SAW amplitude of 1.4 nm was obtained on an aluminum specimen with 0.71 MW/cm2power density of second-harmonic waves (532 nm) of a Q-switched Nd:YAG laser. An application to anisotropic SAW velocity measurement on a silicon (100) surface was carried out.
KW - Elastic anisotropy
KW - Fringe
KW - Laser-generated ultrasounds
KW - Nondestructive evaluation
KW - Optical knife edge method
KW - Phase velocity scanning method
KW - Scanning interference
KW - Surface acoustic waves
KW - Thermoelastic effect
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U2 - 10.1143/JJAP.33.3260
DO - 10.1143/JJAP.33.3260
M3 - Article
AN - SCOPUS:0028422537
VL - 33
SP - 3260
EP - 3264
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 5S
ER -