Optical Pressure Sensing for the Low Vacuum Region by Frequency Measurement

Seiki Inaba, Kazuhiro Hane

Research output: Contribution to journalArticle

Abstract

The optical sensing system has been proposed for measuring the pressure in the low-vacuum region from the resonance frequency of a photothermal vibration of a thin glass plate. Resonance frequency decreased with increasing pressure in the above region, and its shift was relatively large as compared with that of the quartz oscillator gauge. By using the string-of-beads model, it was clarified that the thin plate is more effective than thick one for obtaining large value of the resonance frequency shift.

Original languageEnglish
Pages (from-to)894-898
Number of pages5
JournalShinku
Volume34
Issue number12
DOIs
Publication statusPublished - 1991 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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