Optical Pressure Sensing for the Low Vacuum Region by Frequency Measurement

Seiki Inaba; Kazuhiro Hane

doi:10.3131/jvsj.34.894

Optical Pressure Sensing for the Low Vacuum Region by Frequency Measurement

Research output: Contribution to journal › Article › peer-review

Abstract

The optical sensing system has been proposed for measuring the pressure in the low-vacuum region from the resonance frequency of a photothermal vibration of a thin glass plate. Resonance frequency decreased with increasing pressure in the above region, and its shift was relatively large as compared with that of the quartz oscillator gauge. By using the string-of-beads model, it was clarified that the thin plate is more effective than thick one for obtaining large value of the resonance frequency shift.

Original language	English
Pages (from-to)	894-898
Number of pages	5
Journal	Shinku
Volume	34
Issue number	12
DOIs	https://doi.org/10.3131/jvsj.34.894
Publication status	Published - 1991 Jan 1
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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abstract = "The optical sensing system has been proposed for measuring the pressure in the low-vacuum region from the resonance frequency of a photothermal vibration of a thin glass plate. Resonance frequency decreased with increasing pressure in the above region, and its shift was relatively large as compared with that of the quartz oscillator gauge. By using the string-of-beads model, it was clarified that the thin plate is more effective than thick one for obtaining large value of the resonance frequency shift.",

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AB - The optical sensing system has been proposed for measuring the pressure in the low-vacuum region from the resonance frequency of a photothermal vibration of a thin glass plate. Resonance frequency decreased with increasing pressure in the above region, and its shift was relatively large as compared with that of the quartz oscillator gauge. By using the string-of-beads model, it was clarified that the thin plate is more effective than thick one for obtaining large value of the resonance frequency shift.

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Optical Pressure Sensing for the Low Vacuum Region by Frequency Measurement

Abstract

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