Optical near-field probe integrated with self-aligned bow-tie antenna and electrostatic actuator for local field enhancement

Kentaro Iwami, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

Microelectromechanical systems (MEMS)-based near-field scanning optical microscopy (NSOM) probes with a bow-tie antenna structure consisting of two metal triangular electrodes separated by a narrow gap have been designed and fabricated. An electrostatic actuator is integrated on this bow-tie probe to decrease the gap width for enhancing the optical near-field intensity. A self-alignment process based on deep reactive ion etching and wet anisotropic etching is established to fabricate the symmetric bow-tie structure. The static and dynamic actuations of electrostatic actuators are examined. With the mechanical resonance of the antenna structure to lateral direction, NSOM imaging is performed in the visible range, and the subwavelength resolution beyond the diffraction limit of light is demonstrated.

Original languageEnglish
Pages (from-to)1201-1208
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume15
Issue number5
DOIs
Publication statusPublished - 2006 Oct 1

Keywords

  • Bow-tie antenna
  • Electrostatic actuator
  • Microelectromechanical systems (MEMS)
  • Near-field scanning optical microscopy (NSOM)
  • Surface plasmon polariton

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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