A prototype of a miniaturized hydrophone was fabricated using MEMS technologies. The hydrophone was designed to have a performance comparable to conventional commercially available hydrophones. The micro hydrophone was fabricated from a silicon plate and reinforced glass, and it detects pressure waves by using laser interference. The prototype of the hydrophone has a diameter of 9 mm and height of 13mm. The frequency response of the prototype had response from 300 Hz to 1000 Hz, although the absolute sensitivity has not yet been evaluated.
|Publication status||Published - 2001|
|Event||2001 Society of Exploration Geophysicists Annual Meeting, SEG 2001 - San Antonio, United States|
Duration: 2001 Sep 9 → 2001 Sep 14
|Other||2001 Society of Exploration Geophysicists Annual Meeting, SEG 2001|
|Period||01/9/9 → 01/9/14|
ASJC Scopus subject areas