Optical interference type micro hydrophone fabricated by micro-machining

Hiroshi Asanuma, Satoshi Hashimoto, Gaku Suzuki, Hiroaki Niitsuma, Masayoshi Esashi

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

A prototype of a miniaturized hydrophone was fabricated using MEMS technologies. The hydrophone was designed to have a performance comparable to conventional commercially available hydrophones. The micro hydrophone was fabricated from a silicon plate and reinforced glass, and it detects pressure waves by using laser interference. The prototype of the hydrophone has a diameter of 9 mm and height of 13mm. The frequency response of the prototype had response from 300 Hz to 1000 Hz, although the absolute sensitivity has not yet been evaluated.

Original languageEnglish
Publication statusPublished - 2001 Jan 1
Event2001 Society of Exploration Geophysicists Annual Meeting, SEG 2001 - San Antonio, United States
Duration: 2001 Sep 92001 Sep 14

Other

Other2001 Society of Exploration Geophysicists Annual Meeting, SEG 2001
CountryUnited States
CitySan Antonio
Period01/9/901/9/14

ASJC Scopus subject areas

  • Geophysics

Fingerprint Dive into the research topics of 'Optical interference type micro hydrophone fabricated by micro-machining'. Together they form a unique fingerprint.

Cite this