Optical interference type micro hydrophone fabricated by micro-machining

Hiroshi Asanuma, Satoshi Hashimoto, Gaku Suzuki, Hiroaki Niitsuma, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

A prototype of a miniaturized hydrophone was fabricated using MEMS technologies. The hydrophone was designed to have a performance comparable to conventional commercially available hydrophones. The micro hydrophone was fabricated from a silicon plate and reinforced glass, and it detects pressure waves by using laser interference. The prototype of the hydrophone has a diameter of 9 mm and height of 13mm. The frequency response of the prototype had response from 300 Hz to 1000 Hz, although the absolute sensitivity has not yet been evaluated.

Original languageEnglish
Pages (from-to)45-47
Number of pages3
JournalSEG Technical Program Expanded Abstracts
Volume20
Issue number1
DOIs
Publication statusPublished - 2001 Jan 1

ASJC Scopus subject areas

  • Geotechnical Engineering and Engineering Geology
  • Geophysics

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