Optical interconnection on silicon LSI chips

Shin Yokoyama; T. Nagata; T. Namba; Y. Kuroda; T. Doi; Koji Miyake; S. Miyazaki; Atsushi Iwata; Tadashi Ae; Mitsumasa Koyanagi; Masataka Hirose

Optical interconnection on silicon LSI chips

Shin Yokoyama, T. Nagata, T. Namba, Y. Kuroda, T. Doi, Koji Miyake, S. Miyazaki, Atsushi Iwata, Tadashi Ae, Mitsumasa Koyanagi, Masataka Hirose

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Light propagation loss of the micron size optical waveguides is found to be improved from 1.8 to 0.6 dB/cm by capping waveguides by Al film. Al micromirrors for changing the light propagation direction in the vertical and horizontal planes were fabricated. Various shapes of Al corner mirrors to change the light direction in the horizontal plane were investigated. The straight simple mirror at an angle of 45° against the incident light has the largest reflectivity of 50%. Branched waveguides were also fabricated by using Al corner mirrors and resulted in the almost equal distribution of the light for three branches. Light emitting diodes (LEDs), micromirrors, waveguides and photodetectors have been integrated on a single chip and the signal transfer from the LED to the photodetector has been verified.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	Society of Photo-Optical Instrumentation Engineers
Pages	89-93
Number of pages	5
ISBN (Print)	0819417475
Publication status	Published - 1995 Jan 1
Event	Optoelectronic Interconnects III - San Jose, CA, USA Duration: 1995 Feb 8 → 1995 Feb 9

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2400
ISSN (Print)	0277-786X

Other

Other	Optoelectronic Interconnects III
City	San Jose, CA, USA
Period	95/2/8 → 95/2/9

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Cite this

Yokoyama, S., Nagata, T., Namba, T., Kuroda, Y., Doi, T., Miyake, K., Miyazaki, S., Iwata, A., Ae, T., Koyanagi, M., & Hirose, M. (1995). Optical interconnection on silicon LSI chips. In Proceedings of SPIE - The International Society for Optical Engineering (pp. 89-93). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2400). Society of Photo-Optical Instrumentation Engineers.

Optical interconnection on silicon LSI chips. / Yokoyama, Shin; Nagata, T.; Namba, T.; Kuroda, Y.; Doi, T.; Miyake, Koji; Miyazaki, S.; Iwata, Atsushi; Ae, Tadashi; Koyanagi, Mitsumasa; Hirose, Masataka.

Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 1995. p. 89-93 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2400).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yokoyama, S, Nagata, T, Namba, T, Kuroda, Y, Doi, T, Miyake, K, Miyazaki, S, Iwata, A, Ae, T, Koyanagi, M & Hirose, M 1995, Optical interconnection on silicon LSI chips. in Proceedings of SPIE - The International Society for Optical Engineering. Proceedings of SPIE - The International Society for Optical Engineering, vol. 2400, Society of Photo-Optical Instrumentation Engineers, pp. 89-93, Optoelectronic Interconnects III, San Jose, CA, USA, 95/2/8.

Yokoyama, Shin ; Nagata, T. ; Namba, T. ; Kuroda, Y. ; Doi, T. ; Miyake, Koji ; Miyazaki, S. ; Iwata, Atsushi ; Ae, Tadashi ; Koyanagi, Mitsumasa ; Hirose, Masataka. / Optical interconnection on silicon LSI chips. Proceedings of SPIE - The International Society for Optical Engineering. Society of Photo-Optical Instrumentation Engineers, 1995. pp. 89-93 (Proceedings of SPIE - The International Society for Optical Engineering).

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abstract = "Light propagation loss of the micron size optical waveguides is found to be improved from 1.8 to 0.6 dB/cm by capping waveguides by Al film. Al micromirrors for changing the light propagation direction in the vertical and horizontal planes were fabricated. Various shapes of Al corner mirrors to change the light direction in the horizontal plane were investigated. The straight simple mirror at an angle of 45° against the incident light has the largest reflectivity of 50%. Branched waveguides were also fabricated by using Al corner mirrors and resulted in the almost equal distribution of the light for three branches. Light emitting diodes (LEDs), micromirrors, waveguides and photodetectors have been integrated on a single chip and the signal transfer from the LED to the photodetector has been verified.",

author = "Shin Yokoyama and T. Nagata and T. Namba and Y. Kuroda and T. Doi and Koji Miyake and S. Miyazaki and Atsushi Iwata and Tadashi Ae and Mitsumasa Koyanagi and Masataka Hirose",

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AU - Miyake, Koji

AU - Miyazaki, S.

AU - Iwata, Atsushi

AU - Ae, Tadashi

AU - Koyanagi, Mitsumasa

AU - Hirose, Masataka

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AB - Light propagation loss of the micron size optical waveguides is found to be improved from 1.8 to 0.6 dB/cm by capping waveguides by Al film. Al micromirrors for changing the light propagation direction in the vertical and horizontal planes were fabricated. Various shapes of Al corner mirrors to change the light direction in the horizontal plane were investigated. The straight simple mirror at an angle of 45° against the incident light has the largest reflectivity of 50%. Branched waveguides were also fabricated by using Al corner mirrors and resulted in the almost equal distribution of the light for three branches. Light emitting diodes (LEDs), micromirrors, waveguides and photodetectors have been integrated on a single chip and the signal transfer from the LED to the photodetector has been verified.

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