Optical interconnection on silicon LSI chips

Shin Yokoyama, T. Nagata, T. Namba, Y. Kuroda, T. Doi, Koji Miyake, S. Miyazaki, Atsushi Iwata, Tadashi Ae, Mitsumasa Koyanagi, Masataka Hirose

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Light propagation loss of the micron size optical waveguides is found to be improved from 1.8 to 0.6 dB/cm by capping waveguides by Al film. Al micromirrors for changing the light propagation direction in the vertical and horizontal planes were fabricated. Various shapes of Al corner mirrors to change the light direction in the horizontal plane were investigated. The straight simple mirror at an angle of 45° against the incident light has the largest reflectivity of 50%. Branched waveguides were also fabricated by using Al corner mirrors and resulted in the almost equal distribution of the light for three branches. Light emitting diodes (LEDs), micromirrors, waveguides and photodetectors have been integrated on a single chip and the signal transfer from the LED to the photodetector has been verified.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Number of pages5
ISBN (Print)0819417475
Publication statusPublished - 1995 Jan 1
EventOptoelectronic Interconnects III - San Jose, CA, USA
Duration: 1995 Feb 81995 Feb 9

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherOptoelectronic Interconnects III
CitySan Jose, CA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Optical interconnection on silicon LSI chips'. Together they form a unique fingerprint.

Cite this