Optical Encoder Having Pitch-Modulated Photodiode Array

Toshiro Ohashi; Takayuki Hirano; Minoru Sasaki; Kazuhiro Hane; Atsushi Ieki; Keiji Matsui; Masayuki Nashiki

doi:10.1541/ieejsmas.119.86

Optical Encoder Having Pitch-Modulated Photodiode Array

Toshiro Ohashi, Takayuki Hirano, Minoru Sasaki, Kazuhiro Hane, Atsushi Ieki, Keiji Matsui, Masayuki Nashiki

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

In this paper, a novel optical encoder having pitch-modulated photodiode array as an index scale has been proposed for integrating the gratings with the detectors. The pitch-modulated photodiode array, which obtains four phase-shifted signals simultaneously, is specially designed to reduce higher harmonics distortions of displacement signal and then fabricated by using integrated circuit process technology. In a preliminary study, the effect of the sensitivity distribution of the photodiode on the measurement has been evaluated. In the encoder experiment, it is shown that the 3rd and 5th order distortions for the pitch-modulated photodiode array are reduced by approximately a factor of more than 10, and are almost independent of the air gap between the main scale and the index scale. The proposed encoder is effective for obtaining precise positioning.

Original language	English
Pages (from-to)	86-93
Number of pages	8
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	119
Issue number	2
DOIs	https://doi.org/10.1541/ieejsmas.119.86
Publication status	Published - 1999

Keywords

Displacement measurement
Distortion
Optical encoder
Photodiode array
Pitch-modulated

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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title = "Optical Encoder Having Pitch-Modulated Photodiode Array",

abstract = "In this paper, a novel optical encoder having pitch-modulated photodiode array as an index scale has been proposed for integrating the gratings with the detectors. The pitch-modulated photodiode array, which obtains four phase-shifted signals simultaneously, is specially designed to reduce higher harmonics distortions of displacement signal and then fabricated by using integrated circuit process technology. In a preliminary study, the effect of the sensitivity distribution of the photodiode on the measurement has been evaluated. In the encoder experiment, it is shown that the 3rd and 5th order distortions for the pitch-modulated photodiode array are reduced by approximately a factor of more than 10, and are almost independent of the air gap between the main scale and the index scale. The proposed encoder is effective for obtaining precise positioning.",

keywords = "Displacement measurement, Distortion, Optical encoder, Photodiode array, Pitch-modulated",

author = "Toshiro Ohashi and Takayuki Hirano and Minoru Sasaki and Kazuhiro Hane and Atsushi Ieki and Keiji Matsui and Masayuki Nashiki",

year = "1999",

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T1 - Optical Encoder Having Pitch-Modulated Photodiode Array

AU - Ohashi, Toshiro

AU - Hirano, Takayuki

AU - Sasaki, Minoru

AU - Hane, Kazuhiro

AU - Ieki, Atsushi

AU - Matsui, Keiji

AU - Nashiki, Masayuki

PY - 1999

Y1 - 1999

N2 - In this paper, a novel optical encoder having pitch-modulated photodiode array as an index scale has been proposed for integrating the gratings with the detectors. The pitch-modulated photodiode array, which obtains four phase-shifted signals simultaneously, is specially designed to reduce higher harmonics distortions of displacement signal and then fabricated by using integrated circuit process technology. In a preliminary study, the effect of the sensitivity distribution of the photodiode on the measurement has been evaluated. In the encoder experiment, it is shown that the 3rd and 5th order distortions for the pitch-modulated photodiode array are reduced by approximately a factor of more than 10, and are almost independent of the air gap between the main scale and the index scale. The proposed encoder is effective for obtaining precise positioning.

AB - In this paper, a novel optical encoder having pitch-modulated photodiode array as an index scale has been proposed for integrating the gratings with the detectors. The pitch-modulated photodiode array, which obtains four phase-shifted signals simultaneously, is specially designed to reduce higher harmonics distortions of displacement signal and then fabricated by using integrated circuit process technology. In a preliminary study, the effect of the sensitivity distribution of the photodiode on the measurement has been evaluated. In the encoder experiment, it is shown that the 3rd and 5th order distortions for the pitch-modulated photodiode array are reduced by approximately a factor of more than 10, and are almost independent of the air gap between the main scale and the index scale. The proposed encoder is effective for obtaining precise positioning.

KW - Displacement measurement

KW - Distortion

KW - Optical encoder

KW - Photodiode array

KW - Pitch-modulated

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