Optical design of a double pass surface encoder

Yoji Watanabe, Wei Gao, Hiroki Shimizu, Satoshi Kiyono

Research output: Contribution to journalConference articlepeer-review

Abstract

This paper describes the optical design of a new type surface encoder, which consists of a 2D angle grid and a 2D slope sensor for 2D position detection. The sensitivity of the new type surface encoder is two times higher than that of a conventional surface encoder through employing a double pass. A wave optical model of the surface encoder is established for the optical design. Simulations based on the wave optical model are carried out to analyze the behavior of the diffraction pattern on the photo-detector of the slope sensor. Basic experiments are also carried out to confirm the feasibility of the double pass surface encoder.

Original languageEnglish
Article number60520R
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6052
DOIs
Publication statusPublished - 2005
EventOptomechatronic Systems Control - Sappora, Japan
Duration: 2005 Dec 52005 Dec 7

Keywords

  • Double pass
  • Optical sensor
  • Position detection
  • Precision measurement
  • Surface encoder

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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