Optical constant measurements of the uppermost layer of a reflection multilayer using reflection and total electron yield spectra

Takeo Ejima, Tetsuo Harada, Atsushi Yamazki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Total electron yield (TEY) is a method for obtaining optical constants by measuring the angle dependence of the yield intensity in the soft X-ray region [S. V. Pepper, J. Opt. Soc. Am. 60, 805 (1970)]. In this study, previous methods are extended by rewriting the previous formulae of yield intensity: the intensity was directly related to a reflectance and phase value corresponding to both the thickness of the uppermost layer and the reflection phase. Phase values obtained practically from the reflection and TEY measurements were found to change in accordance with increases in the thickness of the uppermost Mo layer. Refractive indices were derived from the phase differences between the two different phase values corresponding to the variation in the uppermost Mo layer. Practical study showed that the refractive indices of the uppermost Mo layer are close to those of MoO2.

Original languageEnglish
Title of host publicationAdvances in X-Ray/EUV Optics, Components, and Applications
DOIs
Publication statusPublished - 2006 Nov 9
EventAdvances in X-Ray/EUV Optics, Components, and Applications - San Diego, CA, United States
Duration: 2006 Aug 142006 Aug 16

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6317
ISSN (Print)0277-786X

Other

OtherAdvances in X-Ray/EUV Optics, Components, and Applications
CountryUnited States
CitySan Diego, CA
Period06/8/1406/8/16

Keywords

  • Extinction coefficient
  • Extreme ultraviolet
  • Multilayer
  • Optical constants
  • Phase
  • Reflection
  • Refractive index
  • TEY
  • Total electron yield
  • Vacuum ultraviolet

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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