Optical characterization of SiO2-TiO2 thin films with graded refractive index profiles

Xinrong Wang, Hiroshi Masumoto, Yoshihiro Someno, Toshio Hirai

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Development of high-quality optical filters has received considerable attention because it's important device in the wavelength division multiplexing technique to realize optical communication with high speed and great capacity. In this work, the graded refractive index profiles are induced in the structure of designed multilayer filters by means of the concept of the functionally graded materials (FGM). Optical characterization of designed and fabricated novel filters with graded refractive index profiles in the SiO2-TiO2 system was investigated. Designed reflection filters have the symmetrical structure with graded refractive index profiles combining with the layers modifying index difference and exhibit higher optical performance than unmodified rugate filter. Designed transmission filters exhibit almost 100% transmittance at the designated wavelength band which can be changed in the range from 1 to 50 nm and a wide reflection region with almost 100% reflectance. A designed 31-layer SiO2-TiO2 film with graded refractive index profiles was fabricated by helicon plasma sputtering and which has superior process controls and consequently better reproducibility. The measured transmittance spectrum exhibited a reflectance of 99.8% at a central wavelength of 730 nm and high transmittance over the wavelength region outside of the reflected band, which corresponded well with calculated one.

Original languageEnglish
Pages (from-to)1069-1074
Number of pages6
JournalNippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals
Volume62
Issue number11
DOIs
Publication statusPublished - 1998 Jan 1

Keywords

  • Graded refractive index
  • Helicon plasma sputtering
  • Multilayer films
  • Optical filter
  • SiO
  • TiO

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys
  • Materials Chemistry

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