Optical analysis of an optical probe for three-dimensional position detection of micro-objects

Sung Ho Jang, Takemi Asai, Yuki Shimizu, Wei Gao

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

In this paper, the relationship between the photodetector outputs and the three-dimensional (3D) positioning of a micro-object in an optical probe is first analyzed based on geometric optics. In the optical model established for the analysis, a collimated laser beam is focused by an objective lens to generate a small beam spot at the focal position and a thin and rectangular micro-object is set close to the focal position. The influence of diffraction of the laser beam is investigated based on a model based on wave optics.

Original languageEnglish
Pages (from-to)862-865
Number of pages4
JournalInternational Journal of Automation Technology
Volume5
Issue number6
DOIs
Publication statusPublished - 2011 Nov

Keywords

  • Focused laser beam
  • Measurement
  • Micro-cutting tool
  • Optical sensor
  • Positioning

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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