Operation of a permanent-magnetsexpanding plasma source connected to a large-volume diffusion chamber

Kazunori Takahashi, Yuki Itoh, Tamiya Fujiwara

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

A 6.6 cm-inner-diameter permanent-magnets-expanding plasma source is connected to a large-volume diffusion chamber of about 76 cm diameter and 100 cm length, and is operated over a range of 20-300 mPa argon gas pressures. An rf power of 13.56MHz for plasma production is maintained at 200W and an expanding magnetic field of about 200G in the source is provided by permanent magnet arrays. A potential drop of a few tens of volts is observed; a supersonic ion beam with energy corresponding to the potential drop is detected in the diffusion chamber. Radial investigation of the ion beam in the diffusion chamber indicates a detachment of the ion beam from the expanding magnetic field lines provided by the permanent magnets, at about several centimetres downstream of the source exit.

Original languageEnglish
Article number15204
JournalJournal of Physics D: Applied Physics
Volume44
Issue number1
DOIs
Publication statusPublished - 2011 Jan 12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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