Online measurement of micro-aspheric surface profile with profile with compensation of scanning error

Y. Arai, A. Shibuya, Y. Yoshikawa, W. Gao

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Online measurement of micro-aspheric surface profile with profile with compensation of scanning error'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds