Online measurement of micro-aspheric surface profile with profile with compensation of scanning error

Y. Arai, A. Shibuya, Y. Yoshikawa, W. Gao

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A novel scanning probe measurement system has been developed to achieve precise profile measurements of micro-aspheric surfaces. The system consists of a scanning stage (a spindle and a linear slide) and a sensor unit. The sensor unit consists of a ring artifact, two capacitance sensors and a contact-mode displacement sensor. The two capacitance sensors scan the surface of the ring artifact to measure and compensate the error motions of the scanning stage while the contact-mode displacement sensor scans the surface of a micro-aspheric. In this paper, a new contact-mode displacement sensor that has a small contact force of less than 2.3 mN and a stable output has been developed. After investigating the fundamental performance of the contact-mode displacement sensor, the sensor has been applied to the micro-aspheric surface profile measurement system. The effectiveness of the measurement system has been verified by the measurement results.

Original languageEnglish
Pages (from-to)175-178
Number of pages4
JournalKey Engineering Materials
Volume381-382
Publication statusPublished - 2008 Jan 1

Keywords

  • Aspheric surface
  • Contact-mode sensor
  • Error separation
  • Precision metrology
  • Profile measurement

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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