One-Step Fabrication of Homogeneous Ta3N5Crystal Photoanodes Using TaF5Evaporation Supply for Photoelectrochemical Water Splitting

Yusaku Matsui, Tetsuya Yamada, Sayaka Suzuki, Takeharu Yoshii, Hirotomo Nishihara, Katsuya Teshima

Research output: Contribution to journalArticlepeer-review


Photoelectrochemical (PEC) water splitting using photocatalysts is a promising technique to convert solar energy into chemical fuels, namely, hydrogen and oxygen. Ta3N5 is a visible-light-responsive photocatalyst and its practical application requires photoanodes with good performance, uniformity, and large area. Though there are several reports on the fabrication of Ta3N5 photoanodes, there still exist problems such as erosion, impurities, and cracks, preventing the development of high-quality photoanodes over large areas. To overcome this problem, we demonstrate a new method to fabricate Ta3N5 photoanodes using evaporated TaF5 as the source of tantalum. The as-synthesized Ta3N5 layers were well-formed with columnar crystals; they were found to be uniformly deposited on different large-area substrates and worked as efficient active photoanodes for PEC water splitting. These results could be achieved due to the intrinsically low boiling point and high reactivity of TaF5. We believe the new insights obtained from this study on TaF5 as a precursor for nitrides can be used to develop high-quality Ta-based photoanodes over different substrates with large areas.

Original languageEnglish
Pages (from-to)2690-2695
Number of pages6
JournalACS Applied Energy Materials
Issue number3
Publication statusPublished - 2021 Mar 22


  • TaFevaporation
  • TaN
  • photoanode
  • photocatalyst
  • photoelectrochemical water splitting

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Energy Engineering and Power Technology
  • Electrochemistry
  • Electrical and Electronic Engineering
  • Materials Chemistry


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