One-millimeter diameter harmonic ball surface acoustic wave gas sensor with temperature compensation by itself

Dongyoun Sim, Bryan Maxey, Nobuo Takeda, Noritaka Nakaso, Naoya Iwata, Toshihiro Tsuji, Kazushi Yamanaka

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

A newly designed 1-mm diameter harmonic ball surface acoustic wave (SAW) gas sensor has a double-electrode interdigital transducer (IDT) for driving multiple frequencies. The fundamental frequency is 80 MHz. The difference in delay time between a fundamental frequency component and a high harmonics was used to compensate temperature drift. A temperature coefficient of about 0.1 ppm/°C was obtained after compensation.

Original languageEnglish
Pages (from-to)4070-4075
Number of pages6
JournalJapanese journal of applied physics
Volume47
Issue number5 PART 2
DOIs
Publication statusPublished - 2008 May 23

Keywords

  • Double-electrode IDT
  • Harmonic ball SAW gas sensor
  • Hydrogen gas sensor
  • Temperature compensation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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