One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE

Takashi Abe, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review

103 Citations (Scopus)


In this paper, we present a one-chip multichannel quartz crystal microbalance (QCM) sensor fabricated by deep reactive ion etching (Deep RIE). An inductively coupled plasma reactive ion etching (ICP RIE) using SF6 gas has been applied to the Deep RIE of quartz. High etch rate (approximately 0.5 μm/min) and mirror surface (roughness, approximately 2 nm) were achieved at the conditions of low process pressure (2 mTorr) and high self-bias voltage (-340 V). The multichannel QCM sensor, which has different resonance frequencies, was formed by fabricating diaphragms of different thicknesses on a single crystal of quartz plate. The resonance frequencies ranged from 21.7 to 20.75 MHz. The Q factors of each peak were approximately 2000 in air and the resolution for mass change was ±1 ng on 2-mm-diameter electrode. We have successfully shown that the sensor with different coating films can be applied to chemometric odor sensor.

Original languageEnglish
Pages (from-to)139-143
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number1
Publication statusPublished - 2000 May 15
EventThe 10th International Conference on Solid-State Sensors and Actuators TRANSDUCERS '99 - Sendai, Jpn
Duration: 1999 Jun 71999 Jun 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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