On-wafer monitoring for conductivity of sidewall in SiO2 contact holes

T. Shinmura, S. Soda, M. Koyanagi, K. Hane, S. Samukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint Dive into the research topics of 'On-wafer monitoring for conductivity of sidewall in SiO<sub>2</sub> contact holes'. Together they form a unique fingerprint.

Physics & Astronomy

Chemical Compounds

Engineering & Materials Science