On the origin and elimination of macroscopic defects in MBE films

C. E.C. Wood, L. Rathbun, H. Ohno, D. DeSimone

Research output: Contribution to journalArticlepeer-review

75 Citations (Scopus)

Abstract

Spitting of group III metal droplets from Knudsen type effusion cells has been found culpable for a genre of problematical macroscopic surface topographical defects observed in the growth of semiconductor films by molecular beam epitaxy. Successful precautions are described which virtually eliminate the problem.

Original languageEnglish
Pages (from-to)299-303
Number of pages5
JournalJournal of Crystal Growth
Volume51
Issue number2
DOIs
Publication statusPublished - 1981 Feb
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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