On-machine measurement of a cylindrical surface with sinusoidal micro-structures by an optical slope sensor

Wei Gao, Makoto Tano, Shinji Sato, Satoshi Kiyono

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

This paper describes the measurement of a cylindrical surface with sinusoidal micro-structures over a large area on a diamond turning machine. The sinusoidal micro-structures, which are fabricated on the periphery surface of a cylinder by the fast tool servo-based diamond turning, are superposition of periodic sine-waves along the cylinder axis and the cylinder circumference with amplitudes of 100 nm and wavelengths of 100 μm, respectively. An optical two-dimensional (2D) slope sensor with a multi-spot light beam is developed for measurement of the 2D local slopes of the sinusoidal micro-structured surface. A cylindrical lens is employed in the sensor for removing the influence of the curvature of the cylinder surface. Experiments of fabrication and measurement of the sinusoidal micro-structured surface on an ultra-precision diamond turning machine are carried out.

Original languageEnglish
Pages (from-to)274-279
Number of pages6
JournalPrecision Engineering
Volume30
Issue number3
DOIs
Publication statusPublished - 2006 Jul 1

Keywords

  • Cylindrical surface
  • Diamond turning machine
  • Fast tool servo
  • Measurement
  • Micro-structure
  • Optical sensor
  • Slope
  • Surface profile

ASJC Scopus subject areas

  • Engineering(all)

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