Observation of tunnel FET operation in MOSFET with NiSi/Si schottky source/channel interface

Y. Wu, N. Shigemori, S. Sato, K. Kakushima, P. Ahmet, K. Tsutsui, A. Nishiyama, N. Sugii, K. Natori, Takeo Hattori, H. Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Tunnel FET characteristics has been investigated for MOSFETs with NiSi/Si schottky source structure. Ni silicide were formed by the reaction of Ni with SOI silicon source layer, while ordinary diffusion P + layer was formed for the drain electrode. On-and off-state currents have been evaluated with this structure. The tunnel FET operation is confirmed by the almost constant subthreshold swing at temperatures below 150K.

Original languageEnglish
Title of host publicationSolid State Topics (General) - 218th ECS Meeting
Pages47-52
Number of pages6
Edition31
DOIs
Publication statusPublished - 2011
EventSolid State Topics General Session - 218th ECS Meeting - Las Vegas, NV, United States
Duration: 2010 Oct 102010 Oct 15

Publication series

NameECS Transactions
Number31
Volume33
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherSolid State Topics General Session - 218th ECS Meeting
CountryUnited States
CityLas Vegas, NV
Period10/10/1010/10/15

ASJC Scopus subject areas

  • Engineering(all)

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