Observation of anisotropic initial growth nucleation in liquid phase epitaxy of InP

Yutaka Oyama, Takayuki Suzuki, Ken Suto, Jun Ichi Nishizawa

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

Liquid-phase epitaxial growth of InP was performed at constant growth temperature by the temperature difference method under controlled vapor pressure on InP substrates. Growth temperature was kept constant from 550 °C to 280 °C. The as-grown surface morphology was investigated by Nomarski interference optical microscope and electron microscope. The anisotropic initial growth nuclei are investigated on {0 0 1},{1 1 1}A,B and {1 1 0} oriented InP substrates. This anisotropic behavior is discussed in view of the anisotropy of lateral growth rate due to the preferential surface migration and sticking at specific kinks and steps on the surface.

Original languageEnglish
Pages (from-to)64-73
Number of pages10
JournalJournal of Crystal Growth
Volume222
Issue number1-2
DOIs
Publication statusPublished - 2001 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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