TY - GEN
T1 - Numerical analysis of an electromagnetic CZ-SI growth process by 3D global modeling
AU - Liu, Lijun
AU - Nakano, Satoshi
AU - Kakimoto, Koichi
PY - 2005
Y1 - 2005
N2 - Three-dimensional (3D) thermal flow of silicon melt in an electromagnetic Czochralski (CZ) system was numerically investigated with a recently developed 3D global model. The electromagnetic CZ system was established with a transverse magnetic field and an injected electric current applied on the melt surface. Different azimuthal and radial positions of the electrode on the melt surface were taken into account to investigate their influences on the heat and mass transfer in the melt, as well as on the melt-crystal interface. The influence of the electric current direction on the melt flow pattern and temperature distribution was also demonstrated. The results showed that the position of the electrode on the melt surface and the direction of the applied electric current play an important role in controlling the heat and mass transfer in the silicon melt.
AB - Three-dimensional (3D) thermal flow of silicon melt in an electromagnetic Czochralski (CZ) system was numerically investigated with a recently developed 3D global model. The electromagnetic CZ system was established with a transverse magnetic field and an injected electric current applied on the melt surface. Different azimuthal and radial positions of the electrode on the melt surface were taken into account to investigate their influences on the heat and mass transfer in the melt, as well as on the melt-crystal interface. The influence of the electric current direction on the melt flow pattern and temperature distribution was also demonstrated. The results showed that the position of the electrode on the melt surface and the direction of the applied electric current play an important role in controlling the heat and mass transfer in the silicon melt.
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U2 - 10.1115/HT2005-72496
DO - 10.1115/HT2005-72496
M3 - Conference contribution
AN - SCOPUS:29744450942
SN - 0791847314
SN - 9780791847312
T3 - Proceedings of the ASME Summer Heat Transfer Conference
SP - 229
EP - 235
BT - Proceedings of the ASME Summer Heat Transfer Conference, HT 2005
T2 - 2005 ASME Summer Heat Transfer Conference, HT 2005
Y2 - 17 July 2005 through 22 July 2005
ER -