NSPUDT using c-axis tilted ScAlN thin film

Abhay Kochhar, Yasuo Yamamoto, Akihiko Teshigahara, Ken Ya Hashimoto, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'NSPUDT using c-axis tilted ScAlN thin film'. Together they form a unique fingerprint.

Engineering & Materials Science