NSPUDT using c-axis tilted ScAlN thin film

Abhay Kochhar, Yasuo Yamamoto, Akihiko Teshigahara, Ken Ya Hashimoto, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports finding of directionality in the 44% Scandium doped Aluminum Nitride thin film based surface acoustic wave devices. Some previously reported SAW devices using bulk substrates showed higher power of acoustic signals in either forward or backward direction depending on their crystal orientations and are called natural single-phase unidirectional transducers (NSPUDT). As these reports were based on bulk substrates, for the first time, we report NSPUDT using c-axis tilted Scandium doped Aluminum Nitride thin film SAW devices on sapphire. In addition, we also examined the c-axis tilt dependency to improve transducers return loss. It is worth to put in notice here that our observance of directionality is specifically in sezawa wave. Hence, the comparison for both acoustic waves i.e. Rayleigh and Sezawa is also reported.

Original languageEnglish
Title of host publication2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages633-636
Number of pages4
ISBN (Electronic)9781479988662
DOIs
Publication statusPublished - 2015 Jun 29
Event2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Denver, United States
Duration: 2015 Apr 122015 Apr 16

Publication series

Name2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings

Other

Other2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015
CountryUnited States
CityDenver
Period15/4/1215/4/16

Keywords

  • NSPUDT
  • SAW devices
  • Sc-doped aluminum nitride thin film
  • c-axis tilted thin film

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Signal Processing

Fingerprint Dive into the research topics of 'NSPUDT using c-axis tilted ScAlN thin film'. Together they form a unique fingerprint.

  • Cite this

    Kochhar, A., Yamamoto, Y., Teshigahara, A., Hashimoto, K. Y., Tanaka, S., & Esashi, M. (2015). NSPUDT using c-axis tilted ScAlN thin film. In 2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings (pp. 633-636). [7138925] (2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, FCS 2015 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/FCS.2015.7138925