Novel si nanodisk fabricated by biotemplate and defect-free neutral beam etching for solar cell application

Chi Hsien Huang, Makoto Igarashi, Susumu Horita, Masaki Takeguchi, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Seiji Samukawa

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We have already developed a uniform silicon-based two-dimensional quantum dot superlattice (2D QDSL) (i.e., 2D array of Si nanodisks) on the x-y plane with high-density nanodisks (NDs) and controllable size and spacing between NDs. To integrate more nanodisks in the third dimension (z-axis), a new stacked nanodisk (S-ND) has been developed by using thin film deposition, bio-template and advanced alternate etching. The SND structure comprises of two NDs connected vertically by coupling a tunnel junction (TJ). The scanning transmission electron microscopy image clearly revealed the stacked structure. The quantum confinement of S-ND was confirmed by observing the Coulomb staircase at room temperature. Tunneling current could be controlled by changing TJ thickness. By simply changing the ND thickness, band gap energy (Eg) could be controlled. These characteristics of the quantum effect and Eg play important roles in QDSL solar cells.

Original languageEnglish
Article number04DL16
JournalJapanese journal of applied physics
Volume49
Issue number4 PART 2
DOIs
Publication statusPublished - 2010 Apr 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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