Novel quantum effect devices realized by fusion of bio-template and defect-free neutral beam etching

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An original top-down process involving a bio-template and damage-free neutral beam etching (NBE) has been developed to fabricate a high-quality nanodisk superlattice. The self-assemble ferritin 2D array (iron core diameter: 4.5 nm) acts as uniform etching mask and our developed neutral beam etching eliminates UV photons and high-energy charged particles to achieve a damage-free etching. As a result, we have fabricated a high-quality nanodisk superlattice with a high density (1.4 × 1012 cm-2), uniform size (Si nanodisk diameter: 6.4 nm), and well-ordered arrangement (hexagonal close packing). The Si nanodisk 2D array with SiC interlayer had an extremely high optical absorption coefficient and high carrier transport due to the formation of a wide miniband. This advanced nano-process brings high-efficiency quantum dot (QD) solar cell (SC).

Original languageEnglish
Title of host publicationProceedings of the 2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
Pages316-317
Number of pages2
DOIs
Publication statusPublished - 2013 Mar 13
Event2013 IEEE 5th International Nanoelectronics Conference, INEC 2013 - Singapore, Singapore
Duration: 2013 Jan 22013 Jan 4

Publication series

NameProceedings - Winter Simulation Conference
ISSN (Print)0891-7736

Other

Other2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
CountrySingapore
CitySingapore
Period13/1/213/1/4

ASJC Scopus subject areas

  • Software
  • Modelling and Simulation
  • Computer Science Applications

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