Novel processing of high aspect ratio 1-3 structures of high density PZT

S. N. Wang, J. F. Li, R. Toda, R. Watanabe, K. Minami, M. Esashi

Research output: Contribution to conferencePaperpeer-review

11 Citations (Scopus)

Abstract

A new process for the fabrication of fine scale, high aspect ratio PZT 1-3 composite structures has been developed. In this process, lost mold technique is utilized with a Si mold prepared by deep reactive ion etching (RIE). Due to the high strength and high melting point of Si, PZT sintering under high pressures without removing the mold becomes possible, leading to structures of highly condensed PZT in the precise shape of the mold. The typical PZT structures in this work are periodically arrayed rods 16 μm in diameter, 100 μm in height, resulting in an aspect ratio higher than six. The fabricated structures are to be applied to high resolution micro-ultrasonic transducers in the frequency range of 20 MHz for medical purpose.

Original languageEnglish
Pages223-228
Number of pages6
Publication statusPublished - 1998 Jan 1
EventProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems - Heidelberg, Ger
Duration: 1998 Jan 251998 Jan 29

Other

OtherProceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems
CityHeidelberg, Ger
Period98/1/2598/1/29

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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