Novel process for surface treatment of AlN - High-temperature oxidation behavior of AlN

Hiroyuki Fukuyama, Tetsuharu Tanoue, Kazuhiro Nagata

Research output: Contribution to journalConference articlepeer-review

Abstract

In order to understand fundamental mechanism of oxidation of aluminum nitride (AlN) and develop a new surface treatment forming a protective oxide scale on AlN, the oxidation behavior of AlN powder has been studied in an oxygen or oxygen/nitrogen atmosphere by thermogravimetry-differcntial thermal analysis and in-situ x-ray diffractometry. In the initial stage of heating AlM, oxygen mostly dissolves into AlN, When the temperature reaches a threshold temperature, an abrupt oxidation occurred. The mechanism of the abrupt oxidation is discussed in association with the dissolved oxygen. On the basis of the results and discussion, a new surface treatment is proposed to form a crack-free protective oxide scale on AlN.

Original languageEnglish
Pages (from-to)149-157
Number of pages9
JournalCeramic Transactions
Volume195
Publication statusPublished - 2006 Jul 24
Event6th Pacific Rim Conference on Ceramic and Glass Technology, PacRim6 - Maui, HI, United States
Duration: 2005 Sep 112005 Sep 16

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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