Novel fabrication method of the tiny aperture tip on silicon cantilever for near field scanning optical microscopy

Ngoc Minh Phan, Takahito Ono, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

6 Citations (Scopus)

Abstract

In this paper we present a novel fabrication method of a miniature aperture on a Si cantilever for Near field Scanning Optical Microscopy (NSOM). The Si cantilever with a SiO2 pyramidal tip was microfabricated in a batch process. The silicon was thermally oxidized at low temperature (1050 °C). Due to the effect of locally compressive intrinsic stress within the oxide on the solubility of oxygen, the thermal silicon oxide at the bottom of the pyramidal etch pit is thinner. Thus, a tiny aperture can be created by partly etching the SiO2 in buffered HF solution. Using the etching method aperture size ranging from 150 nm to 500 nm have been experimental realized. By optimizing the SiO2 etching time, sub 100 nm size apertures are feasible using the fabrication method. The fabricated probe was mounted to an Atomic Force Microscope (AFM) head. The AFM in contact mode and corresponding NSOM images of Au patterns on Si wafer were simultaneously recorded.

Original languageEnglish
Pages360-365
Number of pages6
Publication statusPublished - 1999 Jan 1
EventProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA
Duration: 1999 Jan 171999 Jan 21

Other

OtherProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
CityOrlando, FL, USA
Period99/1/1799/1/21

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Novel fabrication method of the tiny aperture tip on silicon cantilever for near field scanning optical microscopy'. Together they form a unique fingerprint.

Cite this